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FABRICACIÓN DE ESTRUCTURAS 
SUBMICROMÉTRICAS USANDO 
LITOGRAFÍA DE NANOIMPRESIÓN 
TRABAJO FIN DE GRADO PARA 
LA OBTENCIÓN DEL TÍTULO DE 
GRADUADO EN INGENIERÍA EN 
TECNOLOGÍAS INDUSTRIALES 
SEPTIEMBRE 2022 
Iñigo Mañueco Rubio 
 
DIRECTORES DEL TRABAJO FIN DE GRADO: 
Rafael Casquel del Campo 
Luca Tramarin 
 
 
AGRADECIMIENTOS 
 
A mis tutores Luca Tramarin y Rafael Casquel, investigadores del Centro de Tecnología 
Biomédica (CTB), gracias por haberme introducido al campo de la investigación, dedicándome 
vuestro tiempo y esfuerzo. Espero que los resultados obtenidos en este proyecto sean de utilidad 
y ayuden con las futuras investigaciones que se puedan llevar a cabo. 
 
Al resto de trabajadores del CTB, que me han tratado siempre como uno más ayudándome a 
cualquier duda o inquietud que se me planteaba. 
 
A mis padres y mi hermano, que siempre me impulsaron y me dieron los medios necesarios 
para conseguir lo que quería, levantándome en los momentos duros y felicitándome en los 
grandes triunfos. 
 
A mi abuelo Carlos Mañueco, doctor ingeniero industrial que siempre fue un referente en 
diferentes campos de la ingeniería y un ejemplo a seguir a la hora de trabajar y conseguir los 
objetivos planteados. 
 
A mis amigos y mi novia, que sin su apoyo y comprensión diaria a lo largo de estos cinco años 
nada de esto hubiese sido posible. 
 
 
RESUMEN 
 
El contenido del trabajo de fin de grado trata de la optimización de la fabricación de estructuras 
submicrométricas usando Litografía de Nanoimpresión o NIL (por sus siglas en inglés, 
Nanoimprint Lithography). El trabajo expuesto a continuación puede dividirse en cuatro 
grandes bloques. 
 
En los primeros capítulos se presentan una serie de fundamentos teóricos que ayudan a situar 
el estado del arte actual de la litografía, cómo ha evolucionado ésta desde sus inicios hasta hoy 
en día, describiendo los diferentes tipos que existen y estudiando finalmente cuál es el resultado 
que se quiere obtener tras su aplicación. Una vez determinados todos los aspectos 
fundamentales sobre la litografía, el desarrollo teórico se centrará en el NIL. 
 
Los principales contenidos abarcados en esta primera parte contemplan, desde la creciente 
tendencia a emplear microchips que Gordon Moore definió como la Ley de Moore, hasta las 
diferentes técnicas de nano y microfabricación conocidas como top-down y bottom-up. Por 
otro lado, se describen las principales técnicas de litografía que fueron apareciendo a lo largo 
de los años, entre las que destacan la fotolitografía, la litografía por haz de electrones, la 
litografía por interferencia láser y la litografía por nanoimpresión. La principal diferencia entre 
estas es la necesidad o no de emplear una fotomáscara y la fuente mediante la que se ataca el 
sustrato. Posteriormente, la explicación se enfoca en el NIL: se retorna a sus orígenes y se 
describe el proceso realizado por su descubridor Stephen Chou; se diferencia entre los dos tipos 
de NIL en función del tipo de curado del sello (UV-NIL y Thermal-NIL) y en función de la 
rigidez de este (Soft-NIL y Hard-NIL); y finalmente se explican todas las variantes al NIL 
(Simultaneous Thermal and UV NIL, Reverse Imprint Process, Laser-Assisted Direct Imprint y 
Roll Imprint Process). La última parte del contenido teórico se centra en los objetivos finales 
de estos procesos. De esta manera se introducen los biosensores, centrando la explicación en 
los biosensores ópticos y finalmente se habla a cerca de los BICELLS, que son un conjunto de 
nanopilares que contienen biorreceptores inmovilizados en su superficie. Conceptos como los 
nanopilares y nanoagujeros serán claves y muy recurrentes a lo largo del trabajo, considerados 
como una tecnología en auge en el campo de la nanofabricación. Como su propio nombre indica 
son pilares y agujeros, respectivamente, de tamaño submicrométrico. 
 
A continuación, se presentan los diferentes procesos que son necesarios para la obtención de 
nanoagujeros en la resina de los chips dentro del proceso de litografía por nanoimpresión. 
 
Para empezar, se debe limpiar el máster de posibles restos de procesos anteriores. Para ello se 
somete a una disolución “Piraña” formada por ácido sulfúrico y agua oxigenada, con el objetivo 
de eliminar los residuos orgánicos. Posteriormente se introduce la oblea en otra disolución de 
ácido fluorhídrico para eliminar los óxidos. Una vez limpia, en función del tipo de material 
empleado se sigue un procedimiento u otro. En el caso de que el molde se fabrique a partir de 
un polidimetilsiloxano curable por ultravioleta (UV-PDMS), se debe fabricar un marco dentro 
del cual se deposita el UV-PDMS, y posteriormente se somete a un curado térmico con 
parámetros que se fueron modificando a lo largo del proyecto. Si por el contrario el sello se va 
a fabricar a partir de Ormostamp, se debe depositar encima de una placa de cuarzo una capa de 
polidimetilsiloxano (PDMS) sobre la que se asiente el molde. Este procedimiento a diferencia 
del anterior no precisa de curado térmico. Sea cual fuese el material seleccionado para la 
fabricación del sello, se debe someter a un curado por ultravioleta. Finalmente, se realiza el NIL 
y Flood-Exposure. Una vez finalizado, se observa mediante un microscopio óptico. Si el 
resultado es positivo, se vuelve a analizar con un microscopio electrónico. Si por el contrario 
 
 
es negativo, en función de si es la primera vez o no que se fabrica con esos parámetros de curado 
térmico, se repite o se modifican dichos parámetros, respectivamente. 
 
 
Una vez estudiados todos los procesos de laboratorio que se llevan a cabo, se presentan los 
resultados que se han obtenido a lo largo del proyecto. 
 
Se han fabricado un total de 9 sellos, a partir de los cuales se han obtenido dos chips de cada 
uno. Se han ido modificando los parámetros del curado térmico, para conseguir nanoestructuras 
rígidas con patrones regulares, así como los materiales para la fabricación del molde. El 
resultado final ha sido muy positivo, donde los parámetros del curado térmico que mejor han 
funcionado han sido 200ºC de temperatura máxima y un tiempo total de 24 horas empleando el 
material UV-PDMS. 
 
Finalmente, gracias a la alta calidad de los resultados obtenidos, se ha procedido a continuar 
con la obtención del proceso de nanopilares resonantes mediante diferentes técnicas que 
inicialmente no iban a ser abarcadas en este proyecto. Por este motivo se incluyeron en las 
líneas futuras de investigación porque deben ser optimizados de la misma manera que se ha 
hecho con la obtención de nanoagujeros en la resina de los chips. 
 
Palabras clave 
 
Litografía, nanoimpresión, nanoagujeros, nanopilares, NIL, SEM. 
 
Key words 
 
Lithography, nanoimprint, nanoholes, nanopillars, NIL, SEM. 
 
Códigos Unesco 
 
2209 Física-Óptica. 
3312 Ciencias tecnológicas-Tecnologías de materiales. 
 
 
 
ÍNDICE 
 
1. MOTIVACIÓN .......................................................................................................... 1 
2. OBJETIVOS .............................................................................................................. 2 
3. METODOLOGÍA ....................................................................................................... 3 
4. DESARROLLO TEÓRICO ........................................................................................ 4 
4.1. MINITUARIZACIÓN Y NANOIMPRESIÓN .............................................................. 4 
4.2. LITOGRAFÍA ............................................................................................................... 6 
4.2.1. Principales técnicas de litografía ..................................................................................................... 6 
4.2.1.1. Fotolitografía .......................................................................................................................... 6 
4.2.1.2. Litografía por haz de electrones .............................................................................................7 
4.2.1.3. Litografía por interferencia láser ............................................................................................ 7 
4.2.1.4. Litografía por nanoimpresión (NIL) ...................................................................................... 8 
4.2.1.4.1. Orígenes del NIL ............................................................................................................... 8 
4.2.1.4.2. Principales tipos de NIL .................................................................................................. 10 
4.2.1.4.3. Tipos de NIL en función de los sellos ............................................................................. 10 
4.2.1.4.4. Variantes al NIL .............................................................................................................. 11 
4.3. BIOSENSORES ........................................................................................................... 14 
4.3.1. Biosensores ópticos ....................................................................................................................... 14 
4.3.1.1. BICELLs y Nanopilares Resonantes .................................................................................... 15 
5. PROCESOS LLEVADOS A CABO EN EL LABORATORIO .................................... 17 
5.1. ESQUEMA GENERAL DE LOS PROCESOS ........................................................... 17 
5.2. LIMPIEZA DEL MÁSTER Y PROCESO DE SILANIZACIÓN ............................... 18 
5.3. SIGUIENTES PASOS PARA SELLOS DE UV-PDMS .............................................. 20 
5.3.1. Fabricación del marco ................................................................................................................... 20 
5.3.2. Fabricación del molde ................................................................................................................... 20 
5.4. SIGUIENTES PASOS PARA SELLOS DE ORMOSTAMP ...................................... 23 
5.5. PROCESOS DE CURADO POR ULTRAVIOLETA ................................................. 24 
6. RESULTADOS OBTENIDOS ................................................................................... 26 
6.1. ESTADO PREVIO AL COMIENZO DEL PROYECTO ........................................... 26 
6.2. RESULTADOS A OBTENER ..................................................................................... 28 
6.3. PROCEDIMIENTO DE ESTUDIO DE RESINAS ..................................................... 29 
6.4. SELLO 13_06 .............................................................................................................. 31 
6.4.1. Chip 13_06_1 ................................................................................................................................ 31 
6.4.1.1. Celda 1x4 ............................................................................................................................. 31 
6.4.1.2. Celda 5x3 ............................................................................................................................. 33 
6.4.2. Chip 13_06_2 ................................................................................................................................ 33 
6.4.2.1. Celda 2x2 ............................................................................................................................. 34 
6.4.2.2. Celda 5x3 ............................................................................................................................. 34 
6.5. SELLO 15_06 .............................................................................................................. 35 
6.6. SELLO I_200 ............................................................................................................... 38 
6.6.1. Chip I_200_1 ................................................................................................................................. 38 
 
 
6.7. SELLO IF .................................................................................................................... 40 
6.7.1. Chip IF_1 ....................................................................................................................................... 40 
6.8. SELLO ILD ................................................................................................................. 41 
6.8.1. Chip ILD_1 .................................................................................................................................... 41 
6.8.1.1. Celda 2x3 ............................................................................................................................. 41 
6.8.1.2. Celda 2x4 ............................................................................................................................. 42 
6.8.1.3. Metalización y visualización en el SEM .............................................................................. 43 
6.9. SELLO IL_48 .............................................................................................................. 47 
6.9.1. Celda 3x1 ....................................................................................................................................... 47 
6.9.2. Celda 5x2 ....................................................................................................................................... 48 
6.9.3. Celda 5x4 ....................................................................................................................................... 49 
6.10. SELLO SF_48 .............................................................................................................. 50 
6.10.1. Celda 3x2 .................................................................................................................................. 50 
6.10.2. Celda 5x2 .................................................................................................................................. 51 
6.11. SELLO O-S .................................................................................................................. 52 
6.11.1. Celda 1x3 .................................................................................................................................. 52 
6.11.2. Celda 2x3 .................................................................................................................................. 52 
6.11.3. Chip O_S_1 .............................................................................................................................. 53 
7. CONCLUSIONES ..................................................................................................... 54 
7.1. CONCLUSIÓN DE LOS RESULTADOS OBTENIDOS ............................................ 54 
7.2. CONCLUSIÓN DEL PROYECTO ............................................................................. 55 
8. LÍNEAS FUTURAS DE INVESTIGACIÓN ............................................................. 56 
9. PRESUPUESTO ....................................................................................................... 60 
10. PLANIFICACIÓN TEMPORAL ........................................................................... 61 
11. ABREVIATURAS Y ACRÓNIMOS ....................................................................... 63 
12. ANEXOS ............................................................................................................... 64 
12.1. ANEXO 1: CHIP 15_06_1 Y 15_06_2 .......................................................................... 64 
12.2. ANEXO 2: CHIP IF_2 ................................................................................................. 65 
12.3. ANEXO 3: CHIP O_S_2 .............................................................................................. 66 
12.4. ANEXO 4: PARÁMETROS EN LA FABRICACIÓN DEL MÁSTER ...................... 67 
13. BIBLIOGRAFÍA ...................................................................................................68 
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