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18 This chapter emp and simulation o integrated circuit that may not ma should be perfor ulous considerat Furthermore, ba micromachines ( proof-of-concept and solve a spec prototyping of n (devised) before conversion, oper control, optimiz electromagnetic * Parts of this ch CRC Press, Boca Ra of Micro- and Nan Sergey Edward Rochester Institute 0866_book.fm Page 1 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre Nanotechnology* 18.1 Introduction 18.2 Applications of Engineering Biomimetics in Nanomachines Prototyping 18.3 Nanomachines Synthesis and Classification 18.4 Synthesis, Design and Analysis of Nanomachines 18.5 Synchronous Reluctance Nanomachines Prototyping and Synthesis of Synchronous Reluctance Nanomachines • Modeling, Analysis, and Design of Synchronous Reluctance Nanomachines 18.6 Permanent-Magnet Synchronous Nanomachines. Prototyping and Synthesis of Permanent-Magnet Synchronous Nanomachines • Modeling of Permanent-Magnet Synchronous Nanomachines • Optimization of Permanent- Magnet Synchronous Nanomachines 18.7 Induction Nanomachines Prototyping and Synthesis of Induction Nanomachines • Modeling of Induction Nanomachines • Simulation of Induction Nanomachines 18.8 Conclusions hasizes the far-reaching problems in synthesis, design, analysis, modeling, simulation, f nanomachines. Rotational and translational nanomachines, controlled by nanoscale s, can be widely used as nanoscale actuators and sensors. Although this is still a vision terialize in near future, say within 20 to 30 years, fundamental and applied research med. The implications of nanotechnology to motion nanodevices have received metic- ion as technologies to fabricate these nanomachines have been studied and developed. sic fundamentals and applied researched have been performed. Organic and inorganic fabricated using micromachining technologies) serve as nanomachine prototypes and paradigm. These micromachines have been tested and characterized. One must address trum of problems in synthesis, analysis, modeling, optimization, biomimicking, and anomachines. These nanomachines and motion nanodevices must be synthesized attempts to analyze, optimize, and fabricate them, because basic physical features, energy ating principles, and other issues significantly contribute to sequential tasks in analysis, ation, and design. This is of particular significance for electromagnetic and chemo- motion nanomachines. This chapter reports and successfully applies distinct concepts apter were published in Lyshevski, S.E., 2002. NEMS and NEMS: Systems, Devices, and Structures, ton, FL and Lyshevski, S.E. 1999, 2004. Nano- and Micro-Electromechanical Systems: Fundamentals o-Engineering, 1st and 2nd editions, CRC Press, Boca Raton, FL. Lyshevski of Technology ss LLC 18 -2 Chapter 18 and methods. In particular, the field of engineering biomimetics is applied to prototype nanomachines, and the synthesis and classification solver that allows one to synthesize novel nanomachines, as well as classify and refine results are docum validity, and effe 18.1 Intro The benchmarkin of time. All synth biomachines. Du operate. The basi nanobiomachine netic nanomachi Nanomachine the questions of magnetotactic ba horizon by devisi simulation, analy models are deve programs have b data-intensive an overall performa illustrate the effic 18.2 Appl in N One of the mos physics understa design nanomach tionary developed Although promis hended and virtu different electrom chines is based o the E. coli and Sa voltages supplied the proteins that nanomachines. Consider the n propulsion. The filament is drive membrane form of to the axial pro were found to be • Angular v • Torque is • Efficiency 0866_book.fm Page 2 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre various motion nanodevices, is discussed. The fundamental, applied, and experimental ented in order to accomplish the analysis and design illustrating their significance, ctiveness. duction g problems in the synthesis of nanomachines have challenged scientists for a long period esized nano- and microscale machines and motion devices benefit from mimicking of e to nanobiomachines complexity, it is yet unknown how these motion nanobiodevices c physics of different electromagnetic-based nanomachines must be examined because s operate based on chemo-electromagnetic phenomena. Distinct feasible electromag- nes are reported in this chapter. s and motion nanodevices should be modeled, simulated, and analyzed. We examine viability of the devised nanomachines studying Escherichia coli (E. coli) nanobiomotor, cteria, and so forth. The goal is to further expand nanotechnology and nanosystems ng new nanomachines and motion nanodevices solving sequential synthesis, modeling, sis, and optimization problems. To attain the highest degree of integrity, high-fidelity loped and examined. A wide spectrum of interactive software tools, algorithms, and een developed to solve these long-standing problems in heterogeneous simulation and alysis. The optimization and control problems should be solved to guarantee the superior nce of nanomachines. Using the developed mathematical models, the simulation results iency of the modeling, analysis, and optimization methods. ications of Engineering Biomimetics anomachines Prototyping t challenging problems in nanomachine synthesis and prototyping involves the basic nding, analysis, synthesis, and optimization. The synergetic attempts to prototype and ines have been pursued through analysis of complex patterns and paradigms of evolu- nanobiomachines, for example, Escherichia coli, Salmonella typhimurium, and others.1–4 ing results have been reported, the basic physics of nanobiomachines is barely compre- ally unknown.2 At the same time, distinct nanomachines have been devised postulating agnetic fundamentals.3,4 For example, it is possible that the physics of some nanoma- n magnetic media, variable reluctance, or induction electromagnetics. The analysis of lmonella typhimurium rotor structures indicates that nanobiowindings can exist. The to these nanowindings can be controlled (regulated) by the nanobiocircuits formed by may form nanobioprocessors. As a result, we study different electromagnetic-based anobiomotor of E. coli bacteria. The flagella (rotated by nanobiomotors) are used for bacterium is propelled with a maximum speed of 20 µm/sec by flagellar filaments. This n by a 45 nm rotor of the nanobiomotor embedded in the cell wall. The cytoplasmic s a stator. This nanobiomotor integrates more than 20 proteins and operates as a result tonomotive force resulting due to the proton flux. The rated nanobiomotor parameters as follows:2 elocity is 20 rad/sec. 1 × 10–16 N-m. is 50% (estimated). ss LLC Nanotechnology 18 -3 It was commo FliN) that contro involved in the fl 18.2.1. 2-4 The na (connected to th Consider nano MotA and MotB so-called MS and bearing is built f rings each conta there are eight st torque is develop the sodium ions and/or pH gradi MotA and Mo location may cau on FliG. The mo command signals and the cell body biomotor rotates forward (bacteri evaluated, the ba Some bacteria magnetite (Fe 3 O able to precipita bacteria. It was f particles) enclose chain or chains fi are ether 30 to 10 FIGURE 18.2.1 E and rings, rotor im ω Filament with hollow core O Mem I Me FliC(Pep 0866_book.fm Page 3 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre nly reported that the E. coli nanobiomotor has three switch proteins (FliG, FliM, and l the torque, angular velocity, and direction of rotation, respectively.2 These proteins are agellar assembly. The flagellum, flexible joint, and nanobiomotor are shown in Figure nobiomotor has two major parts: a stator (connected to the cell wall) and a rotor e flagellar filament through a flexible joint). biomotor assembly using common terminology. The stator is built using the so-called complexes, while the rotor is built by FliF, FliG, FliM, and FliN proteins forming the C rings. The shaft is made from the proteins FlgB, FlgC, FlgF, and FlgG, whereas the rom the proteins FlgH and FlgI forming the so-called L and P rings. The MS, P, and L in many copies of FliF, FlgI, and FlgH proteins, respectively. Reference 2 reports that ator elements (MotA and MotB complexes), each of which exerts the same force. The ed due to axial flux of protons (in marine bacteria and bacteria that live at high pH, establish the axial flux). The source of energy is a transmembrane electrical potential ent. Thus, the E. coli nanobiomotor is a chemo-electromagnetic nanobiomachine. tB complexes form a transmembrane channel. According to reference 2, proton trans- se the cytoplasmic part of MotA to move or change the geometry, producing the force tor rotates clockwise and counterclockwise, changing the direction as a result of the . When the nanobiomotor rotates clockwise, the flagellar filaments work independently, moves erratically with little net displacement (bacterium tumbles). When the nano- counterclockwise, the filaments rotate in parallel in a bundle that propels the cell body um runs). Although the direction of rotation and some nanobiomotor data can be sic physics of nanobiomachines and their components (proteins) is virtually unknown.2 have organic and inorganic magnetic media. In 1962 Professor Lowenstam discovered 4) biomineralization in the teeth of chitons, demonstrating that living organisms were te the mineral magnetite. In 1975 Richard Blakemore discovered the magnetotactic ound that distinct magnetotactic bacteria contain magnetosomes (magnetic mineral d in the protein-based membranes. In most cases the magnetosomes are arranged in a xed within the cell. In many magnetotactic bacteria, the magnetosome mineral particles 0 nm magnetite (Fe3O4) or, in marine and sulfidic environments, greigite (Fe3S4). These . coli nanobiomotor: integrated nanobiomotor-coupling-flagella complex with different proteins age, and possible protein-based bionanocircuitry geometry. ft L Ring, FlgH ω Basal Disk Mot B Mot A Hook FlgE C Ring FliM, FliN M Ring uter brane Cell wall H+ H+ nner mbrane 45 nm Rotor of the E.coli bionanomotor P Ring, FlgI S RingMS Ring FliF, FliG FlgK FlgL FlgB, FlgC, FlgF Transport Apparatus FliH,I,O,P,Q,R Possible Stator Nanobiowindings Topology FlgG Flh A,B tidoglycan Layer) ss LLC 18 -4 Chapter 18 nanoscale perma field lines. Wheth particles constitu totactic bacteria the cell. The pol chain of particle permanent magn graphic magnetic chain assembly is occur in at least crystal symmetry elongated hexago observed in som shaped, teardrop Examining na important that th manner. The iron from 15 to 30 nm magnets can be m size, and 8 g/cm 3 assemblies that ca These Fe and Co 18.3 Nan The field of eng nanomachines an motion devices. U have shown that n system, interacti electromagnetics FIGURE 18.2.2 M mineral magnetic p 0866_book.fm Page 4 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre nent magnets sense the magnetic field, and bacteria swim (migrate) along the magnetic er the magnetic mineral particles are magnetite or greigite, the chain of magnetosome tes a permanent magnetic dipole fixed within the bacterium. Correspondingly, magne- have two magnetic poles depending on the orientation of the magnetic dipole within es can remagnetized by a magnetic pulse that is greater than the coercive force of the s. The magnetosome particles that are almost perfectly uniformly magnetized form etic domains. All particles are arranged along the chain axis such that the crystallo- easy axes are also aligned. The size specificity and crystallographic orientation of the optimally designed for magnetotaxis in the geomagnetic field. Magnetosome particles three different crystal forms. In M. magnetotacticum, cubo-octahedral forms (cubic of magnetite) is observed. A second type, found in coccoid and vibrioid strains, is an nal prism with the axis of elongation parallel to the 111 crystal direction. A third type, e uncultured cells, is an elongated cubo-octahedral form producing cylindrical, bullet- and arrowhead particles, as Figure 18.2.2 shows. nomachines and motion nanodevices that can be fabricated using nanotechnology, it is ese magnetic materials and magnetic nanoassemblies can be created in a straightforward oxide (Fe3O4) can be affordably fabricated with 99% purity, and the size of particles is (the morphology is spherical and the density is 5 g/cm3). High-energy density nano- ade. Figure 18.2.2 illustrates the nanotechnology-based fabricated Fe (99% purity, 25 nm density) and Co (99.8% purity, 27 nm size, and 9 g/cm3 density) nanoparticles and their n be used in electromagnetic (and electrostatic) nanomachines and motion nanodevices. nanoparticles can be magnetized, making the nanomagnet arrays for nanomachines. omachines Synthesis and Classification ineering biomimetics addresses fundamental design issues that are common to all d provides valuable insight in prototyping, synthesis, and design of nanomachines and sing recently developed basic results and performing fundamental research,3,4 researchers anobiomachines can operate due to the reluctance difference in the closed protonomotive on of magnetic fields established by nanowindings and magnetic media, induction , and so forth. Nanomachine performance depends on nanomachine operating principle, agnetotactic bacterium and image of a chain of 60–100 nm diameter cylindrical magnetosome articles. Nanobabricated Fe and Co nanoparticles and their nanoassemblies. Fe 100 nm Co ss LLC Nanotechnology 18 -5 topology, materi synthesis paradig applied as the ba were developed i A nanomachin solver, which allo tioned into 3 hor of characters, for and, in general, w The electroma Here, the first I are the endless , TABLE 18.3.1 Nanomachines Synthesis and Classifier M G P El ec tro m ag ne tic S ys te m In te gr at ed , I O pe n En de d (O pe n), O En dl es s (C los ed ), E Geometry M G× = { 0866_book.fm Page 5 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre als, and other factors. Novel nanomachines should be synthesized, and cornerstone ms must be derived. It is evident that electromagnetic systems and geometry can be sic variables of particular importance. Different synthesis and classification paradigms n References 3–5. e synthesis and classification solver is described and demonstrated in Table 18.3.1.3,4 This ws one to synthesize and classify electromagnetic-based motion nanodevices, is parti- izontal and 6 vertical strips, and contains 18 sections, each identified by ordered pairs example, (E, P) or (O, C). Hence, the electromagnetic system–geometric set is given as , e have . gnetic synthesis and classification solver represents nanomachines and nanodevicesas entry is a letter chosen from the bounded electromagnetic system set, where E, O, and open-ended, and integrated electromagnetic systems, respectively; hence, M = {E, O, I}. late, P Spherical, S Torroidal, T Conical, N Cylindrical, C Asymmetrical, A Σ Σ ΣΣΣΣ Σ M G E F E S E T I N I C I A× = ( ) ( ) ( ) ( ) ( ) ( ){ }, , , , , , , , , , , ,� M G m g m M g G× = ( ) ∈ ∈{ }, : and m g m M g G( ) ∈ ∈ }, : ,and M G E F E S E T I N I C I A× = ( ) ( ) ( ) ( ) ( ) ( ){ }, , , , , , , , , , , ,� ss LLC 18 -6 Chapter 18 The second entry is a letter from the geometric set, where the geometries are denoted as plate ( P ), spherical ( S ), torroidal ( T ), conical ( N ), cylindrical ( C ), and asymmetrical ( A ) geometry, that is, G = { P , S , T , N , C , A }. It must be em synthesis. For exa electromagnetic integrated ), nove features (inductio netization charac modeling, simula critical problems intensive analysis The analysis o There are some p sponding operati 1. Synchrono netic field by the rot 2. Induction varying st due to the 3. Variable r minimize the magne time-vary 18.4 Synt Different nano- a 3 and 4. In gener induction. A step 1. Devise (sy ciples, top 2. Study elec (phenome 3. Define ap 4. Perform e (stator, ro 5. Define (af (stator, ro 6. Perform c performan 7. Modify, re Thus, in addi examined. It is i electromechanica For example, the 0866_book.fm Page 6 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre phasized that the synthesis and classification solver allows one to attain the topological mple, radial and axial topology nanomachines result. Using the possible geometry and (chemo-electromagnetic or opto-electromagnetic) systems (endless, open-ended, and l organic, inorganic, and hybrid nanoactuators can be synthesized. Different distinct n and synchronous electromagnetics, magnets and ferromagnetic core geometry, mag- teristics, emf distribution, power, torque, size, packaging, etc.) result. Then, performing tion, and analysis, the designer optimizes nanomachine performance. One of the most is to develop accurate mathematical models that allow the designer to perform data- and heterogeneous simulations in order to guarantee accurate performance predictions. f nanobiomachines is far from complete, and there is a significant lack of reliable data.1–4 ossible torque production and energy conversion mechanisms that lead to the corre- on of electromagnetic-based nanomachines and motion nanodevices: us electromagnetics: The torque results due to the interaction of a time-varying mag- established by the stator (rotor) windings and a stationary magnetic field established or (stator) permanent nanomagnets or nanomagnet arrays. electromagnetics: The rotor currents are induced in the rotor windings due to the time- ator magnetic field and motion of the rotor with respect to the stator; the torque results interaction of time-varying electromagnetic fields. eluctance electromagnetics (synchronous nanomachine): The torque is produced to the reluctance of the electromagnetic system; for example, the torque is developed by tic system in an attempt to align the minimum-reluctance path of the rotor with the ing rotating air gap mmf. hesis, Design and Analysis of Nanomachines nd microscale machines and motion devices have been devised and studied in References al, the rotational and translational nanomachines can be classified as synchronous and -by-step procedure in the nanomachine synthesis and design is as follows: nthesis, prototyping and classification tasks) nanomachine researching operational prin- ologies, configurations, geometry, electromagnetic systems, and other features. tro-chemo-mechanical energy conversion and sensing-feedback-control mechanisms na). plication and environmental requirements with performance specifications. lectromagnetic, energy conversion, mechanical, vibroacoustic, and sizing/dimension tor, nanomagnets, air gap, winding, etc.) estimates. fordable and high-yield) technologies, processes, and materials to fabricate structures tor, bearing, post, shaft, etc.) and assembly of nanomachines. oherent electromagnetic, mechanical, vibroacoustic, and thermodynamic design with ce analysis synergetically assessing synthesis, design, and optimization. fine, and optimize the design. tion to devising nanomachines and motion nanodevices, they should be coherently mportant to accurately model, simulate, and analyze very complex electromagnetic, l, and vibroacoustic phenomena in motion nanodevices in order to optimize the design. ultimate goals can be ss LLC Nanotechnology 18 -7 • Increase efficiency, reliability, robustness, ruggedness, and survivability. • Maximize the power, torque, and force densities. • Minimize • Minimize In this way, af cantly influence addressed and so optimization with power density, et concepts. We intr 1. Engineerin 2. The synth 3. Electroma To attain our order to ensure s tromagnetic load and high-frequen must be examine of robust and affo robustness, reliab 18.5 Sync Prototyping The protein foldi the E. coli rotor ( the E. coli nanobi FIGURE 18.5.1 E 0866_book.fm Page 7 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre and attenuate vibrations and noise. losses and torque ripple. fordable high-yield fabrication can be achieved. The nanomachine topologies signifi- nanodevice performance and fabrication. Many of the problems listed have not been lved yet. To meet our objectives, one must study complex phenomena and perform ultimate objectives to guarantee superior achievable performance (efficiency, robustness, c.). To attain the desired nanomachines integrity, we must depart from the conventional oduce entirely new paradigms that are based on g biomimetics (to prototype nanomachines) esis and classification solver (to synthesize and classify nanomachines) gnetic-mechanical optimal design (to maximize efficiency, robustness, power density, etc.) objectives, mathematical models are developed as nanomachines are synthesized. In uperior achievable performance, these nanomachines must be designed for high elec- s, electromagnetic field and flux (current) densities integrating saturation, hysteresis, cy harmonics effects. Therefore, the electromagnetic and electromechanical mechanisms d. Hence, the major emphases should be focused on the development and validation rdable concepts that guarantee significant advantages, for example, increase of efficiency, ility, torque density, and expanded operating envelope. hronous Reluctance Nanomachines and Synthesis of Synchronous Reluctance Nanomachines ng changes the permeability of the media. This can result in the variable reluctance of the MS ring that consists of FliF and FliG proteins) as rotor rotates. At the same time, omotor can operate as a synchronous reluctance nanomachine, as shown in Figure 18.5.1. . coli nanobiomotor with a possible rotor protein assembly. ss LLC 18 -8 Chapter 18 One can hypo in the E. coli nan rotor rotates. To dimensional mol truncated octahe 18.5.1 results in media (protein) as a function of th nanomachines. In design a nanoma the rotor rotates Figure 18.5.2. Th Modeling, A Having performe model, simulate, mathematical mo 1. circuitry e 2. tensional-m Here, the nan and ψas; the ang and load torques The synchrono inertia J, and the As illustratedi rotates with angu ment θr. Using th This magnetizing mum values. In The inductance c 18.5.3. Hence, on tance; L∆m is the The analytic ex analysis with ava One can approxi FIGURE 18.5.2 S 0866_book.fm Page 8 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre thesize that there is a possible reluctance difference in the closed protonomotive system obiomotor. Correspondingly, the torque is developed due to change of reluctances as illustrate the concept, consider the nanoactuator prototype synthesized using three- ecular assemblies. For example, the engineered6 triangle, square, pentagon, heptagon, dron, cross, star N5,6,7,…, and other geometry of protein assemblies shown in Figure different reluctances due to the distinct length of the protonomotive flux through the as rotor rotates. Hence, the reluctance of the magnetic path varies as the rotor rotates e rotor angular displacement θr. This leads one to synthesis of the synchronous reluctance particular, instead of in the closed protonomotive system in the E. coli nanobiomotor, we chine with the endless (closed) electromagnetic system that has a different reluctances as . To illustrate the paradigm, a single-phase reluctance nanoactuator is documented in is nanomachine can be fabricated as a nanoactuator, shown in Figure 18.5.2. nalysis, and Design of Synchronous Reluctance Nanomachines d synthesis (and classification) of synchronous reluctance nanomachines, we must now analyze, and optimize those nanomachines. To fulfill our objectives, the augmented del for the studied single-phase nanomotor is developed as3 quation (Kirchhoff ’s law) is . echanical equation (Newton’s law) is . omachine variables are the phase voltage, current and flux linkages denoted as uas, ias ular velocity and angular displacement denoted as ωr and θr; and the electromagnetic denoted as Te and TL. us reluctance nanomachine parameters are the armature resistance rs, the moment of friction coefficient Bm. n Figure 18.5.2, the quadrature and direct magnetic axes are fixed with the rotor. The rotor lar velocity ωr. The magnetizing reluctance is a function of the rotor angular displace- e number of turns Ns, the magnetizing inductance is found to be Lm(θr) = . inductance varies twice per one revolution of the rotor and has minimum and maxi- particular, one has and Lmmax = hanges as a sinusoidal function of the rotor angular displacement as reported in Figure e has , where is the average value of the magnetizing induc- half of amplitude of the sinusoidal variation of the magnetizing inductance. pression for the Lm(θr) is needed. In general, this can be performed using the finite-element ilable high-performance software, for example, MATLAB, ANSYS, or MATHEMATICA. mate these variations of Lm(θr) as , n= 1, 3, 5, … ingle-phase reluctance nanomachine and the proposed nanomotor with variable reluctance rotor. u r i d dt as s as as = + ψ T B T J d dt e m r L r − − =ω θ2 2 ℜm Ns m r 2 1ℜ− ( )θ L Nm s m r r min max , , ,... ( )= ℜ− = 2 1 0 2 θ θ π π Ns m r r 2 1 1 2 3 2 5 2 ℜ− =min , , ,...( )θ θ π π π L L L fm r m m r( ) ( )θ θ= − ∆ Lm L L Lm r m m n rθ θ( ) = − ∆ cos 2 ss LLC Nanotechnology 18-9 The electroma expression for th finds Thus, the sync The average v angular displacem Making use of and taking note nonlinear differe The lamped-p particular, the 10 FIGURE 18.5.3 M L Lm i ias M= (Re sin2 T L ie m as= ∆ 2 di dt L as = − dωrr r r dt J L d dt = ( = 1 θ ω 0866_book.fm Page 9 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre gnetic torque, developed by single-phase reluctance nanomotors, is found using the e co-energy as given by . Letting , one hronous reluctance nanomotor electromagnetic torque is given as alue of Te is not equal to zero if the current (magnetic field) is a function of the rotor ent θr. As an illustration, let the following current be fed to the motor nanowinding . Then, the electromagnetic torque is and Kirchhoff ’s and Newton’s second laws , of the flux linkage equation , one obtains a set of three ntial equations that models single-phase synchronous reluctance nanomotors as arameters mathematical model developed is verified through nonlinear simulations. In 0 nm (length) × 100 nm (height) × 25 nm (width) synchronous nanomotor with 65 nm agnetizing inductance Lm(θr) = – Lm – L∆m f(θr). Lm min m max Lm L∆m L∆m 0 1 2 π 3 2 π π 2π θr W i L ic as r m r as( , ) ( )θ θ= 12 2 L L Lm r m m rθ θ( ) = − ∆ cos2 W i L L L ic as r ls m m r as, cosθ θ( ) = + −( )12 22∆ T W i i L L L e c as r r as ls m m r = ∂ ( ) ∂ = ∂ + −( ), cosθ θ θ1 2 2 2∆(( ) ∂ =θ θr m as r L i∆ 2 2sin r )θ L ir m M r r= ( ) ≠∆ 2 22 2 2 0sin Re sin sinθ θ θ T L i d L ieav m as r r m M= =∫1 22 0 1 4 2 π θ θ π ∆ ∆sin u r i d dt as s as as = + ψ T B T J d dt e m r L r − − =ω θ2 2 ψ θas ls m m r asL L L i= + −( )∆ cos2 r L L i L L L L s ls m m r as m ls m+ − − + −∆ ∆ ∆cos2 2 θ mm r as r r ls m m r asi L L L u cos sin cos , 2 2 1 2θ ω θ θ + + − ∆ m as r m r Li B T− − )22∆ sin θ ω ss LLC 18-10 Chapter 18 (length) × 25 nm nanowindings ca magnetic materi assigned to be 4. Lmd /Lmq ratio (to represented in Fi Maxwell’s equ application of th of synchronous r where Az is the z and σ and µ are In general, thr ity tensors. These magnetic torque, model synchrono magnetic loads a losses, and other and numerical d The synchron guarantee high p 18.6 Perm Prototyping a Despite the limite machines can be performance axia FIGURE 18.5.4 A Synchronous Reluctance Nanomotor Angular Velocity, ωrm rad sec( ) 0866_book.fm Page 10 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre (width) rotor is examined (see Figure 18.5.2). This nanomotor can be fabricated and n be deposited using available nanotechnologies. The relative permeability of the ferro- al was assumed to be 30000µ0, and the friction was neglected. The ratio Lmd /Lmq was This ratio significantly influences the electromagnetic torque developed. However, high attain higher torque) results in torque ripple and vibrations. The simulation results are gure 18.5.4. ations are used to attain high-fidelity modeling of nanomachines.3 For example, the e magnetic potential as the variable gives the following equation to model the dynamics eluctance nanomachines: -component of the magnetic potential; v is the velocity vector; J is the current density; the conductivity and permeability. ee-dimensional Maxwell’s equations must be applied using conductivity and permeabil- three-dimensional Maxwell’s equations, integrated with the relationships for electro- torsional-mechanical dynamics, and virboacoustic transient behavior, must be used to us reluctance nanomachines. Utilizing this high-fidelity modeling concept, high electro- nd flux densities, saturation, hysteresis, high-frequency harmonics effects, eddy current phenomena can be integrated and examined. Although this leads to formidable analytical ifficulties, they can be resolved using high-performance software such as MATLAB. ous reluctance motors, though quite simple from the fabrication viewpoints, cannot erformance. As a result, other nanomachines are considered. anent-Magnet Synchronous Nanomachines nd Synthesis of Permanent-Magnet Synchronous Nanomachines d research, availability, and inconsistency, efficient permanent-magnet synchronous nano- synthesized utilizing the axial topology and endless electromagnetic system. In fact, high- l topology micromachines have been synthesized, designed, testedand characterized.3 cceleration of a synchronous reluctance nanomotor. 0 0.002 0.004 0.006 0.008 0.01 0 20,000 40,000 60,000 80,000 100,000 Time, (µsec) σ µ σ ∂ ∂ = ∇ − ∇( )+AA AA vv AA JJz z z t 2 ss LLC Nanotechnology 18-11 Although these n have permanent defined and well nology. The adva plicity, affordabil 1. Nanomagn 2. There are 3. Rotor bac 4. It is easy t Utilizing the a synchronous nan machine has we emphasized that machine with 40 evident from Fig Modeling of The prototyping the sequential an electromagnetic- hensively assess a machines. Our g simulation, guara of equations of m simulation, data- The nanomac examined. In nan ical-vibroacousti Maxwell’s equati fields in motion where E and H a permittivity, perm FIGURE 18.6.1 A Stator Stator Rotor N N S S N S S N N S S N S S Rotor 0866_book.fm Page 11 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre anomachines are different compared with the E. coli nanobiomotor, which may not magnets, a similar topology is utilized. Furthermore, we progressed to the same well- -understood inorganic motion nanodevices that can be fabricated utilizing nanotech- ntages of axial topology nanomachines are efficiency and reliability. Fabrication sim- ity, and high-yield result because ets are flat (planar) without strict requirements on the surface roughness and uniformity. no strict shape and magnetic properties requirements imposed on nanomagnets. k ferromagnetic material is not required. o deposit planar nanowires on the flat stator forming nanowindings. xial topology and endless electromagnetic system, we synthesize permanent-magnet omachines. The synthesized nanomachine is reported in Figure 18.6.1. This nano- ll-defined topological analogy compared with the E. coli nanobiomotor. It must be the documented motion nanodevice can be fabricated, and a prototype of the micro- µm rotor was tested and characterized. The planar segmented nanomagnet array, as ure 18.6.1, can be deposited as thin films nanomagnets. Permanent-Magnet Synchronous Nanomachines and synthesis tasks have been reported and performed. As nanomachines are devised, alysis and design problems must be researched. In this section we develop an integrated mechanical-vibroacoustic modeling, analysis, and optimization paradigm to compre- nd control electromagnetic, electromechanical, and vibroacoustic phenomena in nano- oal is to perform high-fidelity modeling to achieve the highest degree of confidence in nteeing accuracy. In particular, the problems to be researched are modeling (deviations otion to model complex phenomena and effects in the time domain), heterogeneous intensive analysis, and robust design. hine electromagnetics, electromagnetic torque production, and energy conversion are omachines, vibration and noise result due to complex electromagnetic-electromechan- c phenomena that are studied. Electromagnetic fields modeling is performed applying ons.3 The following partial differential equations describe time-varying electromagnetic nanodevices that are not based on quantum effects: , , , re the electric and magnetic field intensities; J is the current density; ε, µ, and σ are the eability, and conductivity tensors, respectively; and ρv is the volume charge density. xial permanent-magnet synchronous nanomachine. Stator Windings N N S S S N S S S N N N ωr ∇ × = −EE HHµ ∂∂t ∇ × = +HH EE JJσ ∇⋅ =EE ρ ε v ∇⋅ =HH 0 ss LLC 18-12 Chapter 18 The Lorenz force, which relates the electromagnetic and mechanical phenomena, is given as The electroma volume integral t where the electro For two region flux densities as where M is the r recoil permeabili The negative g The scalar ma zero current den used. We have th Solving the pa the three-dimens 0866_book.fm Page 12 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre gnetic force is found by applying the Maxwell stress tensor. This concept employs a o obtain the stored energy, and magnetic stress energy tensor is s (air gap ag and permanent magnets pm), we have the air gap and permanent magnet and esidual magnetization vector, M = Br /µ0µr; Br is the remanence; and µr is the relative ty. radient of the scalar magnetic potential V gives the magnetic field intensity, for example, gnetic potential satisfies the Laplace equation in free and homogeneous media (with sity and J = 0). For axial topology nanomachines, the cylindrical coordinate system is e equation rtial differential equation3,7 ional air-gap flux density is found as FF EE vv BB EE JJ BB= + × = + ×ρ ρv v( ) FF EE JJ BB ss= + × = ⋅∫ ∫( )ρ µv v s s dv T d 1 �� T T T E D E D E D E D E D E D Es s E s M j j j= + = − − 1 1 1 2 1 2 1 3 2 1 2 2 1 2 DD E D E D E D E D E D B H j j j 2 3 3 1 3 2 3 3 1 2 1 1 1 − + − 22 1 2 1 3 2 1 2 2 1 2 2 3 3 1 3 2 3 B H B H B H B H B H B H B H B H B H B j j j j− HH B Hj j3 1 2− . BB HHag ag= µ0 BB HH JJ HH MMpm pm r pm= + = +µ µ µ0 0( ) HH = −∇V ∇⋅ = ∂ ∂ + ∂ ∂ + ∂ ∂MM 1 1 r rM r r M r M z r z( ) φ 1 1 1 2 2 2 2+ ∂ ∂ ∂ ∂ + + ∂ ∂ + + ∂χ χ φ χ t t ag r r r V r r V V ( ) ∂∂ = ∇⋅ z 2 MM, B r z M a v h r v h gag z i i r i r ( , , ) sinh sinh ( φ µ χ ε ε = + + 0 0 1 aag i i i r v z r v ) cosh sin = ∞∑ 1 ε φ ss LLC Nanotechnology 18-13 where χ and χt are the reversible susceptibility along the easy and transverse magnetization axes; ai is the harmonic amplitude coefficient, and for the trapezoidal-wave magnetization, hr ≤ z ≤ gag + hr, One-dimensio Thus, the maxim Using the deri one finds three-d vibration. It shou The radiated p the developed eq chronous electro Optimization One must attain including perma design is based o complex electrom system, compon efficiency (η) an ripple (Ter), unde In addition to t examined to ensu may want to atta due to the physic 0866_book.fm Page 13 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre ; hr is the rotor thickness. nal air-gap flux density is found to be . um flux density in the air gap is . ved equations for the air-gap flux and emf imensional electromagnetic model for nanomachines dynamics, torque production, and ld be emphasized that the electromagnetic torque is given as ressure p(r, θ, φ, t) is found using the Green function G. We have uations of motion model electromagnetic-mechanical-vibroacoustic behavior of syn- magnetic nanomachines. of Permanent-Magnet Synchronous Nanomachines optimal electromagnetic, mechanical, and vibroacoustic behavior of all nanomachines, nent-magnet synchronous motion nanodevices. The electromagnetic and mechanical n the application of Maxwell’s equations and tensor calculus in order to optimize the echanical behavior in nanomachines. For example, the nanomachine electromagnetic ents (magnets, windings, air gap, etc.) and geometry can be optimized to maximize d robustness, maximizing the electromagnetic torque (Te), as well as minimize torque sirable torque components (Tx and Ty), vibroacoustic signature (p), losses, and so forth. he passive optimization, the active optimization control problem can formulated and re optimal achievable performance. It should be emphasized that although the designer in the ideal characteristics and performance, usually they cannot be achieved simply al limits imposed (power and torque densities, current density, angular velocity, etc.). a i i i = −− 4 2 1 2 1 2 sin( ) ( )π B M h h g a vag z r r ag i i i( ) ( )( ) sinφ µ χ φ= + + = ∞∑0 0 1 1 B M h h g az r r ag i i i max ( )( ) ( )= + + − + = ∞∑µχ0 0 1 1 1 1 emf d t d s = = − ∂ ∂ ⋅∫ ∫EE ll BB ss� TT mm BB= × p r t z t G r d dz R R ( , , , ) ( , , ) ( , , )θ φ ρ ω φ θ φ φ π = − +∫∫ �� 0 2 ss LLC 18-14 Chapter 18 The mathema nonlinear optimi where u is the co Different cont electro-magnetic 18.7 Indu Prototyping Complex three-d bacteria were stu ring that consists assume that shor complex three-di the AAA (ATPase protein superfam including an ATP are found in all o on the geometry biomotor and syn Modeling of By making use th Figure 18.7.1. Th mathematical mo the variables, the as the stator and equations are fou FIGURE 18.7.1 E tion nanomachine. Mot B Mot A Hook F Filament with hollow core Outer Membrane Cell wall (Peptidoglycan Layer) Inner Membrane FliC Tr M rs − as′ Nanostator FliH ω 0866_book.fm Page 14 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre tical formulation of the active optimization control problem is given as the mini-max zation formulation, for example, ntrol vector. rol variables can be used. For axial and radial topology synchronous nanomachines, the field is controlled by varying applied phase voltages. ction Nanomachines and Synthesis of Induction Nanomachines imensional organic complexes and assemblies in E. coli and Salmonella typhimurium died in this chapter. For example, the 45 nm E. coli nanorotor is built as the so-called MS of FliF and FliG proteins. These proteins’ geometry and folding are unknown. One can t-circuited nanowindings can be formed by these proteins. It should be emphasized that mensional organic circuits (windings) can be engineered.6 As another example, consider s Associated with various cellular Activities) interacting protein superfamily. This AAA ily is characterized by a highly conserved module of more than 230 amino acid residues, binding consensus, present in one or two copies in the AAA proteins. The AAA proteins rganisms and are essential for their functionality. The specific attention should be focused and folding of different protein complexes and assemblies. In addition, the E. coli nano- thesized nanomachines can operate as induction nanomachines; see Figure 18.7.1. Induction Nanomachines e documented results, the studied two-phase induction nanomachine is illustrated in e control variables are the phase voltages uas and ubs. To develop lumped-parameter dels of induction nanomachines, we model the stator and rotor circuitry dynamics. As voltages applied to the stator and rotor windings (as, bs and ar, br, respectively) as well rotor currents and flux linkages are used. Using Kirchhoff ’s voltage law, four differential nd to be . coli nanobiomotor with assumed short-circuited rotor nanobiowindings and two-phase induc- L Ring, FlgH Basal Disk lgE C Ring FliM, FliN 45 nm Rotor of the E. coli bionanomotor P Ring, FlgI FlgK FlgL FlgB, FlgC, FlgF ansport Apparatus FlgG S Ring FliF, FliG + +− Lss rs Lss ibs ubs uas ias Ns bs as bs′ br br′ ar ar′ rr + + − − Lrr rr Lrr ibr ubr uar iar Nr Electromagnetic Coupling Nanorotor Flh A,B,I,O,P,Q,R ωr ωr ,Te max min , , , , , ( , , , ) uu TT ∈ U e er x yT T T p t rη θ φ ss LLC Nanotechnology 18-15 • Stator circuitry and • Rotor circ Here, the nano ibs, iar, ibr, ψas, ψbs The nanomach The flux linka angular displacem where is the a Lms is the stator m The number o Taking note of One obtains th rotor circuitry dy u r i d dt as s as as = + ψ u r i d dt bs s bs bs = + ψ θr ′ =iar di dt as di dt bs 0866_book.fm Page 15 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre uitry and machine variables are the phase voltage, current, and flux linkages uas, ubs, uar, ubr, ias, , ψar and ψbr. ine parameters are the resistances of the stator and rotor windings rs and rr. ges are expressed using the phase currents and inductances that are functions of rotor ent. We have ngular displacement; Lss and Lrr are the self-inductances of the stator and rotor windings; agnetizing inductance; and Lls and Llr are the stator and rotor leakage inductances. f turns in the stator and rotor windings are used. We have the expressions , , the turn ratio, we have the following expressions for inductances and rotor resistance: and e following set of nonlinear differential equations in Cauchy’s form to model the stator- namics of induction nanomachines: u r i d dt ar r ar ar = + ψ u r i d dt br r br br = + ψ ψ ψ ψ ψ θas bs ar br ss ms rL L L ' ' cos = −0 mms r ss ms r ms r ms r ms L L L L L sin sin cos cos sin θ θ θ θ θ 0 rr rr ms r ms r rr L L L L ' 'sin cos 0 0− θ θ ii i i i as bs ar br ' ' ′ = N N i i N N ir s ar br r s br, ′ = ′ =u N N u u N N uar r s ar br r s br, ′ = ′ =ψ ψ ψ ψar r s ar br r s br N N N N , ′ = = ′ = ′ +L L N N L L L Lmr ms s r sr rr lr ms, ′=r N N rr s r r 2 2 L r L L L i L L L L rr s ss rr ms as ms ss rr = − ′ ′ − + ′ − 2 2 mms bs r ms rr ss rr ms ar r ri L L L L L i r 2 2 ω ω θ+ ′ ′ − ′ + ′ sin rr rr r ms rr ss rr ms br L L L L L L i ′ + ′ ′ − cos ' θ ω 2 rr r r rr r rr ss rr ms r L L L L L cos sinθ θ− ′ ′ + ′ ′ − 2 uu L L L L u L L L L as ms ss rr ms r ar ms ss rr − ′ − ′ + ′ − 2 cosθ mms r bru2 sin ,θ ′ L r L L L i L L L L rr s ss rr ms bs ms ss rr = − ′ ′ − − ′ − 2 2 mms as r ms rr ss rr ms ar r ri L L L L L i r 2 2 ω ω θ− ′ ′ − ′ − ′ cos rr rr r ms rr ss rr ms br L L L L L L i ′ + ′ ′ − ′ sinθ ω 2 rr r r rr r rr ss rr ms r L L L L L sin cosθ θ+ ′ ′ + ′ ′ − 2 uu L L L L u L L L L bs ms ss rr ms r ar ms ss rr − ′ − ′ − ′ − 2 sinθ mms r bru2 cos ,θ ′ ss LLC 18-16 Chapter 18 In these differ variables. Theref evolution of ind motion, we have The electroma Wc,3 one has the where P is the nu Thus, the torsi It should be em is high. In partic the number of po the output torqu Two torsional- set of nonlinear Simulation o The mathematica and steady-state di dt L r L L i L Lar ss r ss ar ms ss′ = − ′ ′ +2 as r r s r ms ssi r L L + −2 ω θ θsin cos bs r r s ri r L − − 2 ω θ θcos sin ss rL L′ di dt L L L br ss ′ = − + ssL L T P e = 2 ∂ P = − 2 0866_book.fm Page 16 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre ential equations, the angular velocity ωr and displacement θr are used as the state ore, the torsional-mechanical equation of motion must be incorporated to describe the uction nanomachines in the time domain. From Newton’s second law for rotational the following differential equations:gnetic torque developed by induction nanomotors must be found. Using the co-energy following relationship for the electromagnetic torque: mber of poles. onal-mechanical equations of motion are found to be phasized that the angular velocity of nanobiomotors is low whereas the output torque ular, the angular velocity of the E. coli nanobiomotor is 20 rad/sec. This suggests that les may be high. In fact, the output angular velocity of nanomachine is , and e is given as . mechanical differential equations are integrated with the circuitry dynamics to derive a differential equations to model two-phase induction nanomotors. f Induction Nanomachines l model developed is verified performing analysis and examining the transient dynamics operation. We study an induction nanomotor with 100 nm stator outer diameter. The L L Lrr ms ss′ − ′rrr ms ssL L L− sss rr ms ss m L L L′ − ss r ms br r ms ss rr ms r L i L L L L u 2 2 2 − ′ − ′ − ω θcos aas ms ss rr ms r bs ss ss rr ms L L L L u L L L L − ′ − + ′ − 2 2 sinθ ′′uar , r L i L L L L ss r rr ms br ms ss ss ′ ′ − ′ + ′ 2 rrr ms as r r s ss r ms ss L i r L L L L− − +2 ω θ θcos sin sss rr ms bs r r s ss r L L i r L L ′ − + 2 ω θ θsin cos mms rr ms ar r ms ss rr ms r L i L L L L 2 2 2 ′ − ′ + ′ − ω θsin uu L L L L u L L L L as ms ss rr ms r bs ss ss rr ms − ′ − + ′ − 2 cosθ 22 ′ ubr . d dt J T B T d dt r e m r L r r ω ω θ ω = − −( ) = 1 W Pc abs abr r r abs T sr r′( ) = ′ 2 θ ∂θ ∂ θii ii ii LL, , ( ) ∂∂θ θ θ θr abr ms as bs r r r P L i i′ = − − − ii 2 sin cos cos ssinθr ar br ms as ar b i i L i i i ′ ′ ′ + ss br r as br bs ar ri i i i i′( ) + ′ − ′( ) sin cos ,θ θ d dt P J L i i i i i ir ms as ar bs br r as b ω θ= − ′ + ′( ) + ′2 4 sin rr bs ar r m r L r r i i B J P J T d dt − ′( ) − − = cos ,θ ω θ ω 2 ω ωrm P r= 2 T Tem P e= 2 ss LLC Nanotechnology 18-17 nanomotor para and materials th rotor resistances is Lms = 0.000035 10–6 H. The fricti to be 3 × 10–3 V The correspon The angular velo that the angular are performed fo are integrated. T nanomotor reach effects should be hysteresis, vibrat 18.8 Con This chapter rese tromagnetic-base many ways. In p society for 50 ye have analogies an The synthesis an nanomachines. A used in design an oped. These elec derived equation nanomachines. T unsolved basic p high-performanc nanomachines ca and viability of t FIGURE 18.7.2 A Induction Nanomotor Angular Velocity, ωrm 2000 rad sec( ) 0866_book.fm Page 17 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre meters are obtained using the dimension estimates, as well as technologies, processes, at can be potentially used to fabricate this nanomachine. In particular, the stator and are found to be rs = 3125 ohm and rr = 1890 ohm. The stator magnetizing inductance H, whereas the stator and rotor leakage inductances are estimated to be Lls = Llr = 3 × on is neglected (Bm = 0), and P = 2. The rated phase voltages and currents are estimated and 1 µA, respectively. ding files to simulate and analyze this induction nanomachine are developed in MATLAB. city response (transient dynamics) is illustrated in Figure 18.7.2. It must be emphasized velocity is controlled by changing the frequency of the phase voltages. The simulations r an open-loop induction nanomotor without a controller, and the limits on the variables he peak phase currents are 3 µA. The simulation results illustrate that the induction es the rated angular velocity within 0.22 µsec. Although, in general additional nonlinear integrated in the modeling and analysis of nanomachines (nonlinear magnetization, ion, friction, etc.), the realistic results are obtained. clusions arches benchmarking engineering problems in synthesis, design, and analysis of elec- d nanomachines and motion nanodevices. This complements the nanotechnology in articular, high-performance motion nano- and microdevices have been challenged the ars, and very limited progress has been achieved to date. Different nanomachines that d equivalence in nanobiomotors were proposed, prototyped, classified, and examined. d classification solver can be applied to devise, refine (modify), and classify novel ccurate assessment of nanomachine performance depends on mathematical models d analysis. Therefore, high-fidelity mathematical models of nanomachines were devel- tromechanical models were found in the form of nonlinear differential equations. The s of motion allow the designer to study the dynamic and steady-state behavior of his chapter performs fundamental and applied research in response to long-standing roblems, engineering enterprise, and emerging evolutionary demands in synthesis of e affordable nanomachines and motion nanodevices. It is important that the reported n be fabricated achieving affordable high-yield fabrications due to simplicity, feasibility, he motion nanodevices documented. cceleration of a 100 nm induction nanomotor. 0 0.1 0.2 0.3 0.4 0.5 0 500 1000 1500 Time, (µsec) ss LLC 18-18 Chapter 18 References 1. Drexler, E. Interscienc 2. Berg, H. C 3. Lyshevski, S 4. Lyshevski, Microengin 5. Seeman, N 437–443, 1 6. Sinkarenko trodynamic 7. Zilichev, Y micromoto 0866_book.fm Page 18 Thursday, August 5, 2004 3:37 PM © 2005 by CRC Pre K. 2002. Nanosystems: Molecular Machinery, Manufacturing, and Computations, Wiley e, New York. ., The rotary motor of bacterial flagella. J. Annual Rev. Biochemistry, 72, 19–54, 2003. .E., 2002. MEMS and NEMS: Systems, Devices, and Structures, CRC Press, Boca Raton, FL. S.E. 1999, 2004. Nano- and Microelectromechanical Systems: Fundamentals of Nano- and eering, 1st and 2nd editions, CRC Press, Boca Raton, FL. .C., DNA engineering and its application to nanotechnology. Nanotechnology, 17, 999. , V., Multiobjective classification of electromechanical energy conversion devices. Elec- s, 1, 31–35, 1994. .N., Numerically-analytical 3D model for calculations of disk type permanent magnet rs. Proc. Conf. Power Electronics and Motion Control, Warsaw, Poland, 1994. ss LLC Table of Contents Chapter 18 Nanotechnology 18.1 Introduction 18.2 Applications of Engineering Biomimetics in Nanomachines Prototyping 18.3 Nanomachines Synthesis and Classification 18.4 Synthesis, Design and Analysis of Nanomachines 18.5 Synchronous Reluctance Nanomachines Prototyping and Synthesis of Synchronous Reluctance Nanomachines Modeling, Analysis, and Design of Synchronous Reluctance Nanomachines 18.6 Permanent-Magnet Synchronous Nanomachines Prototyping and Synthesis of Permanent-Magnet Synchronous Nanomachines Modeling of Permanent-Magnet Synchronous Nanomachines Optimization of Permanent-Magnet Synchronous Nanomachines 18.7 Induction Nanomachines Prototyping and Synthesis of Induction Nanomachines Modeling of Induction Nanomachines Simulation of Induction Nanomachines 18.8 Conclusions References
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